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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Improving scanner wafer alignment performance by target optimization

Sanchez, Martha I., Ukraintsev, Vladimir A., Leray, Philippe, Jehoul, Christiane, Socha, Robert, Menchtchikov, Boris, Raghunathan, Sudhar, Kent, Eric, Schoonewelle, Hielke, Tinnemans, Patrick, Tuffy,

Année:

2016

Langue:

english

Fichier:

PDF, 871 KB

english, 2016

2

Real-time inspection system utilizing scatterometry pupil data

Baek, Jae Yeon, Leray, Philippe, Charley, Anne-Laure, Spanos, Costas J.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2014

Langue:

english

Fichier:

PDF, 1.52 MB

english, 2014

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Verification and extension of the MBL technique for photo resist pattern shape measurement

Raymond, Christopher J., Isawa, Miki, Tanaka, Maki, Kazumi, Hideyuki, Shishido, Chie, Hamamatsu, Akira, Hasegawa, Norio, De Bisschop, Peter, Laidler, David, Leray, Philippe, Cheng, Shaunee

Année:

2011

Langue:

english

Fichier:

PDF, 3.68 MB

english, 2011

4

[IEEE 2017 IEEE/ACS 14th International Conference on Computer Systems and Applications (AICCSA) - Hammamet, Tunisia (2017.10.30-2017.11.3)] 2017 IEEE/ACS 14th International Conference on Computer Systems and Applications (AICCSA) - Learning Probabilistic Relational Models with (Partially Structured) Graph Databases

El Abri, Marwa, Leray, Philippe, Essoussi, Nadia

Année:

2017

Langue:

english

Fichier:

PDF, 563 KB

english, 2017

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Co-optimization of RegC ® and TWINSCAN TM corrections to improve the intra-field on-product overlay performance

Sanchez, Martha I., Ukraintsev, Vladimir A., Gorhad, Kujan, Sharoni, Ofir, Dmitriev, Vladimir, Cohen, Avi, van Haren, Richard, Roelofs, Christian, Cekli, Hakki Ergun, Callagher, Emily, Leray, Philippe

Année:

2016

Langue:

english

Fichier:

PDF, 5.46 MB

english, 2016

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control

Sanchez, Martha I., Ukraintsev, Vladimir A., Gunay-Demirkol, Anil, Altamirano Sanchez, Efrain, Heraud, Stephane, Godny, Stephane, Charley, Anne-Laure, Leray, Philippe, Urenski, Ronen, Cohen, Oded, Tur

Année:

2016

Langue:

english

Fichier:

PDF, 1.68 MB

english, 2016

7

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Optical Microlithography XXX - Computational scanner wafer mark alignment

Erdmann, Andreas, Kye, Jongwook, Menchtchikov, Boris, Socha, Robert, Raghunathan, Sudharshanan, Lyulina, Irina, Schoonewelle, Hielke, Tinnemans, Patrick, Tuffy, Paul, Leray, Philippe, Jehoul, Christia

Année:

2017

Langue:

english

Fichier:

PDF, 919 KB

english, 2017

8

Alert correlation: Severe attack prediction and controlling false alarm rate tradeoffs

Tabia, Karim, Leray, Philippe

Journal:

Intelligent Data Analysis

Année:

2011

Fichier:

PDF, 1.21 MB

2011

9

A hierarchical Bayesian network approach for linkage disequilibrium modeling and data-dimensionality reduction prior to genome-wide association studies

Raphaël Mourad, Christine Sinoquet, Philippe Leray

Journal:

BMC Bioinformatics

Année:

2011

Langue:

english

Fichier:

PDF, 2.21 MB

english, 2011

10

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Towards manufacturing a 10nm node device with complementary EUV lithography

Hermans, Jan V., Dai, Huixiong, Niroomand, Ardavan, Laidler, David, Mao, Ming, Chen, Yongmei, Leray, Philippe, Ngai, Chris, Cheng, Shaunee, Naulleau, Patrick P.

Année:

2013

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2013

11

[IEEE 2007 IEEE International Parallel and Distributed Processing Symposium - Long Beach, CA, USA (2007.03.26-2007.03.30)] 2007 IEEE International Parallel and Distributed Processing Symposium - Managing dynamic reconfiguration on MIMO Decoder

Wang, Hongzhi, Delahaye, Jean-Philippe, Leray, Pierre, Palicot, Jacques

Année:

2007

Langue:

english

Fichier:

PDF, 7.43 MB

english, 2007

12

[IEEE 2007 International Joint Conference on Neural Networks - Orlando, FL, USA (2007.08.12-2007.08.17)] 2007 International Joint Conference on Neural Networks - Generation of Incompliete Test-Data usinng Bayesinan Networks

Francois, Olivier, Leray, Philippe

Année:

2007

Langue:

english

Fichier:

PDF, 545 KB

english, 2007

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Hybrid overlay metrology with CDSEM in a BEOL patterning scheme

Cain, Jason P., Sanchez, Martha I., Leray, Philippe, Jehoul, Christiane, Inoue, Osamu, Okagawa, Yutaka

Année:

2015

Langue:

english

Fichier:

PDF, 1.43 MB

english, 2015

14

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Design-Process-Technology Co-optimization for Manufacturability IX - DTCO at N7 and beyond: patterning and electrical compromises and opportunities

Sturtevant, John L., Capodieci, Luigi, Ryckaert, Julien, Raghavan, Praveen, Schuddinck, Pieter, Trong, Huynh Bao, Mallik, Arindam, Sakhare, Sushil S., Chava, Bharani, Sherazi, Yasser, Leray, Philippe,

Année:

2015

Langue:

english

Fichier:

PDF, 975 KB

english, 2015

15

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device

Sanchez, Martha I., Ukraintsev, Vladimir A., Leray, Philippe, Halder, Sandip, Di Lorenzo, Paolo, Wang, Fei, Zhang, Pengcheng, Fang, Wei, Liu, Kevin, Jau, Jack

Année:

2016

Langue:

english

Fichier:

PDF, 563 KB

english, 2016

16

[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms

Halder, Sandip, Truffert, Vincent, van den Heuvel, Dieter, Leray, Philippe, Cheng, Shaunee, McIntyre, Greg, Sah, Kaushik, Brown, Jim, Parisi, Paolo, Polli, Marco

Année:

2015

Langue:

english

Fichier:

PDF, 1.57 MB

english, 2015

17

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Next generation of decision making software for nanopatterns characterization: application to semiconductor industry

Sanchez, Martha I., Ukraintsev, Vladimir A., Dervilllé, A., Labrosse, A., Zimmermann, Y., Foucher, J., Gronheid, Roel, Boeckx, C., Singh, Arjun, Leray, Philippe, Halder, Sandip

Année:

2016

Langue:

english

Fichier:

PDF, 2.70 MB

english, 2016

18

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Hybrid overlay metrology for high order correction by using CDSEM

Sanchez, Martha I., Ukraintsev, Vladimir A., Leray, Philippe, Halder, Sandip, Lorusso, Gian, Baudemprez, Bart, Inoue, Osamu, Okagawa, Yutaka

Année:

2016

Langue:

english

Fichier:

PDF, 3.74 MB

english, 2016

19

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Design-based metrology: beyond CD/EPE metrics to evaluate printability performance

Sanchez, Martha I., Ukraintsev, Vladimir A., Halder, Sandip, Mailfert, Julien, Leray, Philippe, Rio, David, Peng, Yi-Hsing, Laenens, Bart

Année:

2016

Langue:

english

Fichier:

PDF, 1.52 MB

english, 2016

20

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Compensating process non-uniformity to improve wafer overlay by RegC

Cain, Jason P., Sanchez, Martha I., Leray, Philippe, Cheng, Shaunee, Cohen, Avi, Graitzer, Erez, Dmitriev, Vladimir, Rehtan, Shiran, Wertsman, Nadav

Année:

2014

Langue:

english

Fichier:

PDF, 671 KB

english, 2014

21

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Diffraction based overlay re-assessed

Raymond, Christopher J., Leray, Philippe, Laidler, David, D'havé, Koen, Cheng, Shaunee

Année:

2011

Langue:

english

Fichier:

PDF, 654 KB

english, 2011

22

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Overlay metrology for double patterning processes

Leray, Philippe, Allgair, John A., Raymond, Christopher J., Cheng, Shaunee, Laidler, David, Kandel, Daniel, Adel, Mike, Dinu, Berta, Polli, Marco, Vasconi, Mauro, Salski, Bartlomiej

Année:

2009

Langue:

english

Fichier:

PDF, 634 KB

english, 2009

23

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - SEM based overlay measurement between resist and buried patterns

Sanchez, Martha I., Ukraintsev, Vladimir A., Inoue, Osamu, Okagawa, Yutaka, Hasumi, Kazuhisa, Shao, Chuanyu, Leray, Philippe, Lorusso, Gian, Baudemprez, Bart

Année:

2016

Langue:

english

Fichier:

PDF, 1.74 MB

english, 2016

24

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Diffraction based overlay metrology: accuracy and performance on front end stack

Leray, Philippe, Allgair, John A., Raymond, Christopher J., Cheng, Shaunee, Kandel, Daniel, Adel, Michael, Marchelli, Anat, Vakshtein, Irina, Vasconi, Mauro, Salski, Bartlomiej

Année:

2008

Langue:

english

Fichier:

PDF, 215 KB

english, 2008

25

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Metrology, Inspection, and Process Control for Microlithography XXXI - Impact of stochastic process variations on overlay mark fidelity "towards the 5nm node"

Sanchez, Martha I., Ukraintsev, Vladimir A., Adel, Michael, Gronheid, Roel, Mack, Chris, Leray, Philippe, Gurevich, Evgeni, Baudemprez, Bart, Vandenheuvel, Dieter, Mani, Antonio, Aharon, Sharon, Klein

Année:

2017

Langue:

english

Fichier:

PDF, 5.76 MB

english, 2017

26

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Metrology, Inspection, and Process Control for Microlithography XXXI - Connected component analysis of review-SEM images for sub-10nm node process verification

Sanchez, Martha I., Ukraintsev, Vladimir A., Halder, Sandip, Leray, Philippe, Sah, Kaushik, Cross, Andrew, Parisi, Paolo

Année:

2017

Langue:

english

Fichier:

PDF, 563 KB

english, 2017

27

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Metrology, Inspection, and Process Control for Microlithography XXXI - Metrology challenges for in-line process control

Sanchez, Martha I., Ukraintsev, Vladimir A., Leray, Philippe

Année:

2017

Langue:

english

Fichier:

PDF, 1.67 MB

english, 2017

28

[IEEE 2017 IEEE/ACS 14th International Conference on Computer Systems and Applications (AICCSA) - Hammamet, Tunisia (2017.10.30-2017.11.3)] 2017 IEEE/ACS 14th International Conference on Computer Systems and Applications (AICCSA) - Customer Relationship Management and Small Data — Application of Bayesian Network Elicitation Techniques for Building a Lead Scoring Model

Benhaddou, Youssef, Leray, Philippe

Année:

2017

Langue:

english

Fichier:

PDF, 340 KB

english, 2017

29

Probabilistic relational model benchmark generation: Principle and application

Ben Ishak, Mouna, Leray, Philippe, Ben Amor, Nahla

Journal:

Intelligent Data Analysis

Année:

2016

Langue:

english

Fichier:

PDF, 953 KB

english, 2016

30

Bringing up to date the French database of nuclear workers contaminated with plutonium and/or americium and treated with Ca-DTPA

Lamart, Stephanie, Carbone, Lise, Jossoud, Laurence, Bérard, Philippe, Castagnet, Xavier, Dauteuil, Jean-Vincent, Gagna, Gérald, Juve, Valérie, Lecoix, Josseline, Lecompte, Yannick, Leray, Dominique,

Journal:

BIO Web of Conferences

Année:

2019

Langue:

english

Fichier:

PDF, 372 KB

english, 2019

31

Heavy-ion test of detectors with conventional and resistive Micromegas used in TPC configuration

Jean-Éric Ducret, Philippe Legou, Jerzy łukasik, Alain Boudard, Michel Combet, BronisŁaw Czech, Robert Durand, Thomas Gorbinet, Pascal Le Bourlout, Sylvie Leray, Vladislav Matousek, François Nizery, P

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2011

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2011

32

A co-design methodology based on model driven architecture for real time embedded systems

Stéphane Lecomte, Samuel Guillouard, Christophe Moy, Pierre Leray, Philippe Soulard

Journal:

Mathematical and Computer Modelling

Année:

2011

Langue:

english

Fichier:

PDF, 1.73 MB

english, 2011

33

Lipid composition of erythrocytes and thrombocytes of a subantarctic seabird, the king penguin

Christine Fayolle, Claude Leray, Philippe Ohlmann, Geneviève Gutbier, Jean-Pierre Cazenave, Christian Gachet, René Groscolas

Journal:

Année:

2000

Langue:

english

Fichier:

PDF, 576 KB

english, 2000

34

A dynamic Bayesian network to represent discrete duration models

Roland Donat, Philippe Leray, Laurent Bouillaut, Patrice Aknin

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 293 KB

english, 2010

35

Tumour growth modifies intravascular polyamine transport by plasma lipoproteins in the mouse

Véronique Catros-Quemener, Geneviève Leray, Jacques-Philippe Moulinoux, René Havouis, Jacques-Donald de Certaines, John Chapman

Journal:

Biochimica et Biophysica Acta (BBA) - Lipids and Lipid Metabolism

Année:

1997

Langue:

english

Fichier:

PDF, 229 KB

english, 1997

36

Lipid composition of blood platelets and erythrocytes of southern elephant seal (Mirounga leonina) and antarctic fur seal (Arctocephalus gazella)

Christine Fayolle, Claude Leray, Philippe Ohlmann, Geneviève Gutbier, Jean-Pierre Cazenave, Christian Gachet, René Groscolas

Journal:

Comparative Biochemistry and Physiology Part B: Biochemistry and Molecular Biology

Année:

2000

Langue:

english

Fichier:

PDF, 101 KB

english, 2000

37

[IEEE 2007 16th IST Mobile and Wireless Communications Summit - Budapest, Hungary (2007.07.1-2007.07.5)] 2007 16th IST Mobile and Wireless Communications Summit - Partial Reconfiguration of FPGAs for Dynamical Reconfiguration of a Software Radio Platform

Delahaye, Jean-Philippe, Palicot, Jacques, Moy, Christophe, Leray, Pierre

Année:

2007

Langue:

english

Fichier:

PDF, 3.10 MB

english, 2007

38

Editorial: Uncertainty in Artificial Intelligence and Databases

Benferhat, Salem, Leray, Philippe

Journal:

International Journal of Approximate Reasoning

Année:

2013

Langue:

english

Fichier:

PDF, 210 KB

english, 2013

39

Discrete exponential Bayesian networks: Definition, learning and application for density estimation

Jarraya, Aida, Leray, Philippe, Masmoudi, Afif

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 963 KB

english, 2014

40

[IEEE 2013 International Joint Conference on Neural Networks (IJCNN 2013 - Dallas) - Dallas, TX, USA (2013.08.4-2013.08.9)] The 2013 International Joint Conference on Neural Networks (IJCNN) - Active learning of causal Bayesian networks using ontologies: A case study

Ben Messaoud, Montassar, Leray, Philippe, Ben Amor, Nahla

Année:

2013

Langue:

english

Fichier:

PDF, 743 KB

english, 2013

41

[IEEE 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO 2013) - Hammamet (2013.4.28-2013.4.30)] 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO) - A RBN-based recommender system architecture

Ben Ishak, Mouna, Ben Amor, Nahla, Leray, Philippe

Année:

2013

Langue:

english

Fichier:

PDF, 724 KB

english, 2013

42

[IEEE 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO 2013) - Hammamet (2013.4.28-2013.4.30)] 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO) - Incremental Bayesian network structure learning in high dimensional domains

Yasin, Amanullah, Leray, Philippe

Année:

2013

Fichier:

PDF, 801 KB

2013

43

[IEEE 2011 IEEE 23rd International Conference on Tools with Artificial Intelligence (ICTAI) - Boca Raton, FL, USA (2011.11.7-2011.11.9)] 2011 IEEE 23rd International Conference on Tools with Artificial Intelligence - Discrete Exponential Bayesian Networks: An Extension of Bayesian Networks to Discrete Natural Exponential Families

Jarraya, Aida, Leray, Philippe, Masmoudi, Afif

Année:

2011

Langue:

english

Fichier:

PDF, 176 KB

english, 2011

44

[IEEE 2008 Third International Conference on Availability, Reliability and Security - (2008.03.4-2008.03.7)] 2008 Third International Conference on Availability, Reliability and Security - Reliability Analysis using Graphical Duration Models

Donat, Roland, Bouillaut, Laurent, Aknin, Patrice, Leray, Philippe

Année:

2008

Langue:

english

Fichier:

PDF, 316 KB

english, 2008

45

[IEEE 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO 2013) - Hammamet (2013.4.28-2013.4.30)] 2013 5th International Conference on Modeling, Simulation and Applied Optimization (ICMSAO) - Benchmarking dynamic Bayesian network structure learning algorithms

Trabelsi, Ghada, Leray, Philippe, Ben Ayed, Mounir, Alimi, Adel M.

Année:

2013

Langue:

english

Fichier:

PDF, 205 KB

english, 2013

46

Implicit parameter estimation for conditional Gaussian Bayesian networks

Jarraya, Aida, Leray, Philippe, Masmoudi, Afif

Journal:

International Journal of Computational Intelligence Systems

Année:

2014

Langue:

english

Fichier:

PDF, 333 KB

english, 2014

47

[IEEE 2014 IEEE 26th International Conference on Tools with Artificial Intelligence (ICTAI) - Limassol, Cyprus (2014.11.10-2014.11.12)] 2014 IEEE 26th International Conference on Tools with Artificial Intelligence - Random Generation and Population of Probabilistic Relational Models and Databases

Ishak, Mouna Ben, Leray, Philippe, Amor, Nahla Ben

Année:

2014

Langue:

english

Fichier:

PDF, 852 KB

english, 2014

48

SemCaDo: A serendipitous strategy for causal discovery and ontology evolution

Ben Messaoud, Montassar, Leray, Philippe, Ben Amor, Nahla

Journal:

Knowledge-Based Systems

Année:

2015

Langue:

english

Fichier:

PDF, 3.33 MB

english, 2015

49

A Personalized Recommender System from Probabilistic Relational Model and Users’ Preferences

Chulyadyo, Rajani, Leray, Philippe

Journal:

Procedia Computer Science

Année:

2014

Langue:

english

Fichier:

PDF, 1.90 MB

english, 2014

50

Implementation of Transportation Distance for Analyzing FLIM and FRET Experiments

Heinrich, Philippe, Gonzalez Pisfil, Mariano, Kahn, Jonas, Héliot, Laurent, Leray, Aymeric

Journal:

Bulletin of Mathematical Biology

Année:

2014

Langue:

english

Fichier:

PDF, 5.66 MB

english, 2014